MICROCOILTM
MICROCOIL surface sensors are ideal for measuring chuck, internal wall, chip, heat sinks and circuit temperatures. The flexible probe design positions the sensor tip for optimal surface contact and isothermal response and accuracy.
Radio Frequency Thermocouple Probe (RF)
RF immersion sensors are designed to reduce transient 13.56 MHz signals from being transmitted on the sensor leads in plasma environments. This results in a more stable and accurate measurement of chuck temperature.
Tapered Thermocouple Probe
The Tapered Thermocouple Probe is designed to provide rapid temperature response in applications where the sensor is inserted in an electrostatic chuck, gas line or wherever a
fast accurate temperature measurement needs to take place in a small area. Tool design using the Tapered Thermocouple Probe is miniaturized by the combination of tapered tip
construction and a new mini-bayonet style fitting.
True Surface Thermocouple (TST)
TST is a surface sensor designed to reduce error in atmospheric applications where air currents can cause instability in temperature accuracy. A winner of Control Engineering’s 2000 Editor’s Choice Award, the TST achieves superior accuracy through a combination of isothermal design and shielding.
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